说明

Asset Description TF0085 Software Version E3.240 CIM SECS Process PASSIVATION System Type Description Quantity Handler System LL & Buffer 1 Factory Interface NONE Others SYSTEM CONTROLLER 1 Main System Mainframe 1 Options System process chamber 4 Description Quantity Robot 5 phase driver 1 DRY PUMP 6 Description Quantity HDD 2 DPA Gen 4 SMIF LEFT 1 HP-Upper & Lower motor assy 1 SBC BD 1 15 POWER SUPPLY 1 Excluded Items List (Pumps, Chillers & Abatement are all excluded)

配置

无配置

OEM 型号描述

The AMAT / APPLIED MATERIALS Centura 5200 is an Etchers & Ashers system. The centura 5200 can be used with 8” wafer size and oxidation etchers size is also 8”. The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.