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Description Dimension Qty MAIN FRAME 87 104 97 1 SYSTEM CONTROLLER 44 44 85 1 RF GENERATOR RACK 48 26 84 1 MONITOR RACK 26 23 56 1 NESLAB CHX-150 38 26 41 1 NESLAB HX-150 38 26 41 1 AMAT-1 HEAT EXCHANGER 2EA 48 41 33 1 BULK CONTR-1: CABLES, HOIST, MISC PARTS 41 49 36 1 BULK CONTR-2: CABLES, HOIST, MISC PARTS 41 49 36 1 MISSING 1. CHILLER DI FILTER TANK X 1EA (CHX-150) 2. CHILLER DI FILTER TANK X 1EA (HX-150) 3. CHILLER DI FILTER TANK X 2EA (AMAT-1) 4. SIGNAL TOWER配置
MODEL : CENTURA PHASE-II METAL PROGRESS TYPE: METAL ETCH CHAMBER POSITION: CH #A - DPS R1 CHAMBER CH #B - DPS R1 CHAMBER CH #C - ASP+ CHAMBER CH #D - ASP+ CHAMBER CH #E - STD COOL DOWN CHAMBER CH #F - ORIENT CHAMBER ROBOT : HP ROBOT TURBO PUMP : ALCATEL ATH 1300M RF GENERATOR : ENI OEM12B/ AE MF5002 CONTROLLER: 84 INCH COMMON CONTROLLER DRY PUMP : N/A CHILLER : NESLAB CHX-150/ HX-150/ AMAT1 X2EAOEM 型号描述
Two new etch systems were launched in 1996 for HDP etching of metal and silicon films, using AMAT's DPS (Decoupled Plasma Source) technology. The DPS Metal Etch Centura and DPS Silicon Etch Centura are aimed at very advanced applications, primarily for deep submicron devices (0.25-micron).文件
类别
Dry / Plasma Etch
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127790
晶圆尺寸：
8"/200mm
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
CENTURA METAL DPS
类别
Dry / Plasma Etch
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127790
晶圆尺寸：
8"/200mm
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available