说明
Alliance (A6) TCP 9400DFM配置
Transport Module / TCP9400DFM-P Modules for Tungsten Silicide Etch Software: A4.0-37VM PM2 - TCP9400DFM-P - Wsix Etch PM3 - TCP9400DFM-P - Wsix Etch PM4 - TCP9400DFM-P - Wsix Etch ESC - Anodized Aluminum Interferometer EP - PM2, PM3 & PM4 Enhanced Universal Gas box - 12 Stick PM2 Gas box : (10) - Brooks GF125 PM3 Gas box: (8) - Unit 1661 Multiflow (1) - Brooks GF100 (1) - Horiba Z300 PM4 Gas Box: (9) - Unit 1661 Multiflow (1) - Horiba Z300 Brooks Automation Mag 7 Dry Pumps: Busch DS80 Cobra (3) Busch BB100 (2) Chillers: TCU - Edwards 40/80 Plus (3) RPM - Voltage SAG EnhancedOEM 型号描述
未提供文件
无文件
类别
Dry / Plasma Etch
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127102
晶圆尺寸：
8"/200mm
年份：
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH CORPORATION
ALLIANCE 6 (A6)
类别
Dry / Plasma Etch
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127102
晶圆尺寸：
8"/200mm
年份：
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Alliance (A6) TCP 9400DFM配置
Transport Module / TCP9400DFM-P Modules for Tungsten Silicide Etch Software: A4.0-37VM PM2 - TCP9400DFM-P - Wsix Etch PM3 - TCP9400DFM-P - Wsix Etch PM4 - TCP9400DFM-P - Wsix Etch ESC - Anodized Aluminum Interferometer EP - PM2, PM3 & PM4 Enhanced Universal Gas box - 12 Stick PM2 Gas box : (10) - Brooks GF125 PM3 Gas box: (8) - Unit 1661 Multiflow (1) - Brooks GF100 (1) - Horiba Z300 PM4 Gas Box: (9) - Unit 1661 Multiflow (1) - Horiba Z300 Brooks Automation Mag 7 Dry Pumps: Busch DS80 Cobra (3) Busch BB100 (2) Chillers: TCU - Edwards 40/80 Plus (3) RPM - Voltage SAG EnhancedOEM 型号描述
未提供文件
无文件