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LAM RESEARCH CORPORATION ALLIANCE 6 (A6)
    说明
    Tool condition: Retrofit ok
    配置
    Layout configuration: Specific Layout definition : Standard -- Mainframe Configuration: Platform : Alliance A6 / 2 loadlocks PM1 : 9400DFM PM2 : 9400DFM PM3 : 9400DFM PM4 : 9400DFM Load Lock type : Auto Door Cassette Type : 25 slot cassette -- Chamber Configuration: Chamber type : 9400DFM ESC : Anodized ESC - Snake type: P/N 718-043893-801 RF Generator : 13.56 MHz RF generators Top :660-024637-026 Bias: 660-024637-028 Alternative: AE Paramount RF generators (Top + Bias) RF Match : Top: 853-032294-002 Bias: 853-250001-024 Endpoint Detector : Spectrometer (LamResearch OES or Verity SD1024D) ESC power supply : P/N: 853-025054-018 or 853-025054-118 Pressure Regulation : VAT 65 pendulum valve RF peak probe (VCI) : ASSY,HSG,CAP DIV/PEAK DET P/N: 853-370871-002 Turbo Pump : 1600l/s - Alcatel ATH1600 -- Gas Pannel configuration: Gas box type : A6 GAS SYSTEM - 12 gases Line 1 : Brooks GF100 MFC / Cl2 - 200 sccm Line 2 : Brooks GP200 MFC / HBr - 500 sccm Line 3 : Brooks GF100 MFC / SF6 - 200 sccm Line 4 : Brooks GF100 MFC / CH2F2 - 100 sccm Line 5 : Brooks GF100 MFC /He O2 (80% He 20% O2) - 500 sccm Line 6 : Brooks GP200 MFC / O2 - 60 sccm Line 7 : Brooks GF100 MFC / CF4 - 200 sccm Line 8 : Brooks GF100 MFC / He - 500 sccm Line 9 : NO GAS Line 10 : Brooks GF100 MFC / O2 500 sccm Line 11 : NO GAS Line 12 : NO GAS PM to Gas Box Intercon Cable PM to Gas Box : 50 ft
    OEM 型号描述
    未提供
    文件

    无文件

    类别
    Dry / Plasma Etch

    上次验证: 60 多天前

    物品主要详细信息

    状况:

    Refurbished


    运行状况:

    未知


    产品编号:

    103535


    晶圆尺寸:

    8"/200mm


    年份:

    1995


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available

    LAM RESEARCH CORPORATION

    ALLIANCE 6 (A6)

    verified-listing-icon
    已验证
    类别
    Dry / Plasma Etch
    上次验证: 60 多天前
    listing-photo-674d7b54cd9549a4b2ef1544298870a0-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/78019/674d7b54cd9549a4b2ef1544298870a0/7e9192ba37134639a5ce10dfa9f636b9_4feedcb44385474984c95ba3b7ccf177_mw.jpeg
    listing-photo-674d7b54cd9549a4b2ef1544298870a0-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/78019/674d7b54cd9549a4b2ef1544298870a0/92d490c24b8e4600bdf9be1d1ee93cd4_79456ca7df5c42ed971b5410a99c072d1201a_mw.jpeg
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    listing-photo-674d7b54cd9549a4b2ef1544298870a0-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/78019/674d7b54cd9549a4b2ef1544298870a0/b1f2c4f7edf04cd09a3d529509f645b7_e847493c64194c169c7c3ee5ac15f446_mw.jpeg
    listing-photo-674d7b54cd9549a4b2ef1544298870a0-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/78019/674d7b54cd9549a4b2ef1544298870a0/edd4657c63424603a0dbc71598f5244a_7f2d7fcb2b25443fb0974b65be60d97b_mw.jpeg
    物品主要详细信息

    状况:

    Refurbished


    运行状况:

    未知


    产品编号:

    103535


    晶圆尺寸:

    8"/200mm


    年份:

    1995


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    说明
    Tool condition: Retrofit ok
    配置
    Layout configuration: Specific Layout definition : Standard -- Mainframe Configuration: Platform : Alliance A6 / 2 loadlocks PM1 : 9400DFM PM2 : 9400DFM PM3 : 9400DFM PM4 : 9400DFM Load Lock type : Auto Door Cassette Type : 25 slot cassette -- Chamber Configuration: Chamber type : 9400DFM ESC : Anodized ESC - Snake type: P/N 718-043893-801 RF Generator : 13.56 MHz RF generators Top :660-024637-026 Bias: 660-024637-028 Alternative: AE Paramount RF generators (Top + Bias) RF Match : Top: 853-032294-002 Bias: 853-250001-024 Endpoint Detector : Spectrometer (LamResearch OES or Verity SD1024D) ESC power supply : P/N: 853-025054-018 or 853-025054-118 Pressure Regulation : VAT 65 pendulum valve RF peak probe (VCI) : ASSY,HSG,CAP DIV/PEAK DET P/N: 853-370871-002 Turbo Pump : 1600l/s - Alcatel ATH1600 -- Gas Pannel configuration: Gas box type : A6 GAS SYSTEM - 12 gases Line 1 : Brooks GF100 MFC / Cl2 - 200 sccm Line 2 : Brooks GP200 MFC / HBr - 500 sccm Line 3 : Brooks GF100 MFC / SF6 - 200 sccm Line 4 : Brooks GF100 MFC / CH2F2 - 100 sccm Line 5 : Brooks GF100 MFC /He O2 (80% He 20% O2) - 500 sccm Line 6 : Brooks GP200 MFC / O2 - 60 sccm Line 7 : Brooks GF100 MFC / CF4 - 200 sccm Line 8 : Brooks GF100 MFC / He - 500 sccm Line 9 : NO GAS Line 10 : Brooks GF100 MFC / O2 500 sccm Line 11 : NO GAS Line 12 : NO GAS PM to Gas Box Intercon Cable PM to Gas Box : 50 ft
    OEM 型号描述
    未提供
    文件

    无文件