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说明
Tool condition: Retrofit ok配置
Layout configuration: Specific Layout definition : Standard -- Mainframe Configuration: Platform : Alliance A6 / 2 loadlocks PM1 : 9400DFM PM2 : 9400DFM PM3 : 9400DFM PM4 : 9400DFM Load Lock type : Auto Door Cassette Type : 25 slot cassette -- Chamber Configuration: Chamber type : 9400DFM ESC : Anodized ESC - Snake type: P/N 718-043893-801 RF Generator : 13.56 MHz RF generators Top :660-024637-026 Bias: 660-024637-028 Alternative: AE Paramount RF generators (Top + Bias) RF Match : Top: 853-032294-002 Bias: 853-250001-024 Endpoint Detector : Spectrometer (LamResearch OES or Verity SD1024D) ESC power supply : P/N: 853-025054-018 or 853-025054-118 Pressure Regulation : VAT 65 pendulum valve RF peak probe (VCI) : ASSY,HSG,CAP DIV/PEAK DET P/N: 853-370871-002 Turbo Pump : 1600l/s - Alcatel ATH1600 -- Gas Pannel configuration: Gas box type : A6 GAS SYSTEM - 12 gases Line 1 : Brooks GF100 MFC / Cl2 - 200 sccm Line 2 : Brooks GP200 MFC / HBr - 500 sccm Line 3 : Brooks GF100 MFC / SF6 - 200 sccm Line 4 : Brooks GF100 MFC / CH2F2 - 100 sccm Line 5 : Brooks GF100 MFC /He O2 (80% He 20% O2) - 500 sccm Line 6 : Brooks GP200 MFC / O2 - 60 sccm Line 7 : Brooks GF100 MFC / CF4 - 200 sccm Line 8 : Brooks GF100 MFC / He - 500 sccm Line 9 : NO GAS Line 10 : Brooks GF100 MFC / O2 500 sccm Line 11 : NO GAS Line 12 : NO GAS PM to Gas Box Intercon Cable PM to Gas Box : 50 ftOEM 型号描述
未提供文件
无文件
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
103535
晶圆尺寸：
8"/200mm
年份：
1995
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH CORPORATION
ALLIANCE 6 (A6)
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
103535
晶圆尺寸：
8"/200mm
年份：
1995
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Tool condition: Retrofit ok配置
Layout configuration: Specific Layout definition : Standard -- Mainframe Configuration: Platform : Alliance A6 / 2 loadlocks PM1 : 9400DFM PM2 : 9400DFM PM3 : 9400DFM PM4 : 9400DFM Load Lock type : Auto Door Cassette Type : 25 slot cassette -- Chamber Configuration: Chamber type : 9400DFM ESC : Anodized ESC - Snake type: P/N 718-043893-801 RF Generator : 13.56 MHz RF generators Top :660-024637-026 Bias: 660-024637-028 Alternative: AE Paramount RF generators (Top + Bias) RF Match : Top: 853-032294-002 Bias: 853-250001-024 Endpoint Detector : Spectrometer (LamResearch OES or Verity SD1024D) ESC power supply : P/N: 853-025054-018 or 853-025054-118 Pressure Regulation : VAT 65 pendulum valve RF peak probe (VCI) : ASSY,HSG,CAP DIV/PEAK DET P/N: 853-370871-002 Turbo Pump : 1600l/s - Alcatel ATH1600 -- Gas Pannel configuration: Gas box type : A6 GAS SYSTEM - 12 gases Line 1 : Brooks GF100 MFC / Cl2 - 200 sccm Line 2 : Brooks GP200 MFC / HBr - 500 sccm Line 3 : Brooks GF100 MFC / SF6 - 200 sccm Line 4 : Brooks GF100 MFC / CH2F2 - 100 sccm Line 5 : Brooks GF100 MFC /He O2 (80% He 20% O2) - 500 sccm Line 6 : Brooks GP200 MFC / O2 - 60 sccm Line 7 : Brooks GF100 MFC / CF4 - 200 sccm Line 8 : Brooks GF100 MFC / He - 500 sccm Line 9 : NO GAS Line 10 : Brooks GF100 MFC / O2 500 sccm Line 11 : NO GAS Line 12 : NO GAS PM to Gas Box Intercon Cable PM to Gas Box : 50 ftOEM 型号描述
未提供文件
无文件