说明
-Oxford Instruments PlasmaPro 100 Cobra with Cobra 300 ICP -Installed but never used. Gasses were not installed.配置
Oxford PlasmaPro 100 Cobra consisting of: • Cobra300 3kW ICP plasma etch source • Chamber and pump down pipe Heating Kit • Compact single wafer loadlock • Electrostatic Shield for ICP plasma source • Cryo-cooled / electrically-heated etch lower electrode kit • Horiba Laser End Point Detector, 670nm • RF 300W generator & amu match for ETCH • Wafer clamping and helium backing kit • 100mT CM gauge • Computer with 22" monitor • Pfeiffer HiPace 80 turbo pump for loadlock • Adixen ATH1600MT turbo, apc & heated backing valve kit • Adixen ACP15G dry pump • Pfeiffer A124H ELT pump • 415V, 50/60Hz 3phase supply configuration • Standard Gas Pod externally mounted (8 lines max)OEM 型号描述
未提供文件
无文件
类别
Dry / Plasma Etch
上次验证： 昨天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
147928
晶圆尺寸：
未知
年份：
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
OXFORD
PLASMAPRO 100 COBRA
类别
Dry / Plasma Etch
上次验证： 昨天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
147928
晶圆尺寸：
未知
年份：
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
-Oxford Instruments PlasmaPro 100 Cobra with Cobra 300 ICP -Installed but never used. Gasses were not installed.配置
Oxford PlasmaPro 100 Cobra consisting of: • Cobra300 3kW ICP plasma etch source • Chamber and pump down pipe Heating Kit • Compact single wafer loadlock • Electrostatic Shield for ICP plasma source • Cryo-cooled / electrically-heated etch lower electrode kit • Horiba Laser End Point Detector, 670nm • RF 300W generator & amu match for ETCH • Wafer clamping and helium backing kit • 100mT CM gauge • Computer with 22" monitor • Pfeiffer HiPace 80 turbo pump for loadlock • Adixen ATH1600MT turbo, apc & heated backing valve kit • Adixen ACP15G dry pump • Pfeiffer A124H ELT pump • 415V, 50/60Hz 3phase supply configuration • Standard Gas Pod externally mounted (8 lines max)OEM 型号描述
未提供文件
无文件