说明
Wafer Count (Lifetime) - 161,012 Older Chamber w/ different accessibility regarding maintenance配置
Gas Layout: SF6 H2 CHF3 CF4 and C4F8 He O2OEM 型号描述
Omega Synapse etch process module uses a high density plasma source and is designed to etch strongly bonded materials.文件
无文件
类别
Dry / Plasma Etch
上次验证： 7 天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Idle
产品编号：
153993
晶圆尺寸：
6"/150mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
OMEGA SYNAPSE
类别
Dry / Plasma Etch
上次验证： 7 天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Idle
产品编号：
153993
晶圆尺寸：
6"/150mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Wafer Count (Lifetime) - 161,012 Older Chamber w/ different accessibility regarding maintenance配置
Gas Layout: SF6 H2 CHF3 CF4 and C4F8 He O2OEM 型号描述
Omega Synapse etch process module uses a high density plasma source and is designed to etch strongly bonded materials.文件
无文件