说明
SPTS Synapse Chamber SPTS Synapse PM. Includes all the necessary components (gas panel, Rf generators, chiller, etc) to install on a new mainframe. It does not come with the dry pump.配置
The gases are SF6, H2, CHF3, CF4, C4F8, He and O2. Powered on, in idle mode The ESC was replaced in 2025.OEM 型号描述
Omega Synapse etch process module uses a high density plasma source and is designed to etch strongly bonded materials.文件
无文件
类别
Dry / Plasma Etch
上次验证： 5 天前
物品主要详细信息
状况：
Parts Tool
运行状况:
未知
产品编号：
146034
晶圆尺寸：
未知
年份：
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
OMEGA SYNAPSE
类别
Dry / Plasma Etch
上次验证： 5 天前
物品主要详细信息
状况：
Parts Tool
运行状况:
未知
产品编号：
146034
晶圆尺寸：
未知
年份：
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
SPTS Synapse Chamber SPTS Synapse PM. Includes all the necessary components (gas panel, Rf generators, chiller, etc) to install on a new mainframe. It does not come with the dry pump.配置
The gases are SF6, H2, CHF3, CF4, C4F8, He and O2. Powered on, in idle mode The ESC was replaced in 2025.OEM 型号描述
Omega Synapse etch process module uses a high density plasma source and is designed to etch strongly bonded materials.文件
无文件