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Telius SP 305 SCCM Dielectric Etch Process Oxide Oxide Etch (3) Shin Chamber (6) EMO Front 3ea, Rear (3) RF Generator TOP (3) RF Generator BTM (3) RF Matcher TOP (3) RF Matcher BTM (12) Gas Line配置
无配置OEM 型号描述
Telius-SP is a high-performance etching system designed for large diameter (300 mm) requirements. It is part of the Telius platform and offers improved productivity through increased throughput, a reduced footprint, and higher energy efficiency. The system can be fitted with various chamber applications, including DRM and SCCM chambers, to support a wide range of process areas. It can support up to 4 chambers and boasts a high throughput, compact design, and low cost of ownership (CoO). Additionally, the system is designed for ease of maintenance. Overall, Telius-SP is a versatile and cost-effective solution for large diameter etching needs.文件
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
81928
晶圆尺寸：
12"/300mm
年份：
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
TELIUS SP 305 SCCM
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
81928
晶圆尺寸：
12"/300mm
年份：
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available