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TEL / TOKYO ELECTRON TELIUS SP 305 SCCM
    说明
    Dielectric Etch
    配置
    <p>Tool is operating in clean room.</p><p> </p><p>[Chamber A]</p><p>Chamber type:DRM</p><p>Gas config. (sccm)=FCS full scale</p><p> 2line(advanced radical distribution control)</p><p> Ar(754)/C4F8(43)/O2(46.8)/O2(1215)</p><p> CF4(336)/CHF3(163)/CH2F2(144)/CH3F(163)</p><p> N2(300)/CO(500)/C4F6(50.3)</p><p> O2(18.7)/N2(30)/CH2F2(14.4)</p><p>RF 13.56MHz, max 5000W</p><p>Temp Top +30~+80℃</p><p>     Wall +40~+80℃</p><p>     ESC -10~+60℃</p><p> </p><p>[Chamber B]</p><p>Chamber type:DRM</p><p>Gas config. (sccm)=FCS full scale</p><p> 2line(advanced radical distribution control)</p><p> Ar(754)/C4F8(43)/O2(46.8)/O2(1215)</p><p> CF4(336)/CHF3(163)/CH2F2(144)/CH3F(163)</p><p> N2(300)/CO(500)/C4F6(50.3)</p><p> O2(18.7)/N2(30)/CH2F2(14.4)</p><p>RF 13.56MHz, max 5000W</p><p>Temp Top +30~+80℃</p><p>     Wall +40~+80℃</p><p>     ESC -10~+60℃</p><p> </p><p>Pictures will be collected.</p><p>Missing or damaged parts: Not reported.</p>
    OEM 型号描述
    Telius-SP is a high-performance etching system designed for large diameter (300 mm) requirements. It is part of the Telius platform and offers improved productivity through increased throughput, a reduced footprint, and higher energy efficiency. The system can be fitted with various chamber applications, including DRM and SCCM chambers, to support a wide range of process areas. It can support up to 4 chambers and boasts a high throughput, compact design, and low cost of ownership (CoO). Additionally, the system is designed for ease of maintenance. Overall, Telius-SP is a versatile and cost-effective solution for large diameter etching needs.
    文件

    无文件

    TEL / TOKYO ELECTRON

    TELIUS SP 305 SCCM

    verified-listing-icon

    已验证

    类别
    Dry / Plasma Etch

    上次验证: 19 天前

    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    21133


    晶圆尺寸:

    12"/300mm


    年份:

    未知


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    类似上架物品
    查看全部
    TEL / TOKYO ELECTRON TELIUS SP 305 SCCM

    TEL / TOKYO ELECTRON

    TELIUS SP 305 SCCM

    Dry / Plasma Etch
    年份: 2008状况: 二手
    上次验证60 多天前

    TEL / TOKYO ELECTRON

    TELIUS SP 305 SCCM

    verified-listing-icon
    已验证
    类别
    Dry / Plasma Etch
    上次验证: 19 天前
    listing-photo-SOFY4og6853aMkuBiXOSJZiH1iwFnKw_T2Q-MI1xJcg-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    21133


    晶圆尺寸:

    12"/300mm


    年份:

    未知


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    说明
    Dielectric Etch
    配置
    <p>Tool is operating in clean room.</p><p> </p><p>[Chamber A]</p><p>Chamber type:DRM</p><p>Gas config. (sccm)=FCS full scale</p><p> 2line(advanced radical distribution control)</p><p> Ar(754)/C4F8(43)/O2(46.8)/O2(1215)</p><p> CF4(336)/CHF3(163)/CH2F2(144)/CH3F(163)</p><p> N2(300)/CO(500)/C4F6(50.3)</p><p> O2(18.7)/N2(30)/CH2F2(14.4)</p><p>RF 13.56MHz, max 5000W</p><p>Temp Top +30~+80℃</p><p>     Wall +40~+80℃</p><p>     ESC -10~+60℃</p><p> </p><p>[Chamber B]</p><p>Chamber type:DRM</p><p>Gas config. (sccm)=FCS full scale</p><p> 2line(advanced radical distribution control)</p><p> Ar(754)/C4F8(43)/O2(46.8)/O2(1215)</p><p> CF4(336)/CHF3(163)/CH2F2(144)/CH3F(163)</p><p> N2(300)/CO(500)/C4F6(50.3)</p><p> O2(18.7)/N2(30)/CH2F2(14.4)</p><p>RF 13.56MHz, max 5000W</p><p>Temp Top +30~+80℃</p><p>     Wall +40~+80℃</p><p>     ESC -10~+60℃</p><p> </p><p>Pictures will be collected.</p><p>Missing or damaged parts: Not reported.</p>
    OEM 型号描述
    Telius-SP is a high-performance etching system designed for large diameter (300 mm) requirements. It is part of the Telius platform and offers improved productivity through increased throughput, a reduced footprint, and higher energy efficiency. The system can be fitted with various chamber applications, including DRM and SCCM chambers, to support a wide range of process areas. It can support up to 4 chambers and boasts a high throughput, compact design, and low cost of ownership (CoO). Additionally, the system is designed for ease of maintenance. Overall, Telius-SP is a versatile and cost-effective solution for large diameter etching needs.
    文件

    无文件

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    查看全部
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