说明
KLA-TENCOR Aleris 8350 Advanced Film Metrology Tool · Dual 300 mm Loadports · Analysis of 190nm-800nm Wavelengths · White Light Reflectometer · Broadband Spectroscopic Ellipsometer · Single Wave Ellipsometer · Stress Measurement · iDesorber配置
无配置OEM 型号描述
The Aleris 8350 is a high-performance film metrology system that meets the tighter process tolerances required for thickness, refractive index and stress measurements on critical films. The Aleris 8350 film thickness measurement system is used for advanced film development, characterization and process control for a wide range of critical films, including ultra-thin diffusion layers, ultra-thin gate oxides, advanced photoresists, 193nm ARC layers, ultra-thin multi-layer stacks, and CVD layers.文件
无文件
类别
Elipsometry
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
132907
晶圆尺寸：
12"/300mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA
ALERIS 8350
类别
Elipsometry
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
132907
晶圆尺寸：
12"/300mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
KLA-TENCOR Aleris 8350 Advanced Film Metrology Tool · Dual 300 mm Loadports · Analysis of 190nm-800nm Wavelengths · White Light Reflectometer · Broadband Spectroscopic Ellipsometer · Single Wave Ellipsometer · Stress Measurement · iDesorber配置
无配置OEM 型号描述
The Aleris 8350 is a high-performance film metrology system that meets the tighter process tolerances required for thickness, refractive index and stress measurements on critical films. The Aleris 8350 film thickness measurement system is used for advanced film development, characterization and process control for a wide range of critical films, including ultra-thin diffusion layers, ultra-thin gate oxides, advanced photoresists, 193nm ARC layers, ultra-thin multi-layer stacks, and CVD layers.文件
无文件