说明
Reactor配置
- 3 atmospheric epi chambers - 1 cool down chamber - Variable Speed Blower - HP+ Robot - Wide Body Loadlocks - On-The-Fly Center Finder - Accusett BMV system - HSMS GEMSECS - 2 mixed dopant supply lines - TCS supply line - Universal loadlock platform (200mm or 150mm) - with 208V external transformer - No process kits includedOEM 型号描述
The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.文件
无文件
APPLIED MATERIALS (AMAT)
CENTURA 5200 HTF
已验证
类别
Epitaxial deposition (EPI)
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
84555
晶圆尺寸：
未知
年份：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
CENTURA 5200 HTF
类别
Epitaxial deposition (EPI)
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
84555
晶圆尺寸：
未知
年份：
2004
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Reactor配置
- 3 atmospheric epi chambers - 1 cool down chamber - Variable Speed Blower - HP+ Robot - Wide Body Loadlocks - On-The-Fly Center Finder - Accusett BMV system - HSMS GEMSECS - 2 mixed dopant supply lines - TCS supply line - Universal loadlock platform (200mm or 150mm) - with 208V external transformer - No process kits includedOEM 型号描述
The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.文件
无文件