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TEL / TOKYO ELECTRON ALPHA(α)-303i
    说明
    FURNACE
    配置
    K type / Poly
    OEM 型号描述
    The Alpha-303i is a 300mm production tool developed by Tokyo Electron. It is the result of years of research and development, with TEL having completed their 300mm batch furnace prototype in 1995. Since then, TEL has delivered numerous atmospheric and LP CVD systems to multiple customer sites and consortia worldwide. The Alpha-303i includes key features such as a 100 product wafer load size, a high-speed multiple-wafer loading system with optical notch alignment, and a Front-Opening Unified Pod (FOUP) interface that is configurable for overhead transfer systems (OHT) and personal guided vehicles (PGV). Additionally, boat rotation is standard on all processes, and a Fast Thermal Processing System (FTP) is available for both atmospheric and CVD systems. This tool reinforces TEL’s commitment to being production ready for the 300mm era of semiconductor manufacturing.
    文件

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    TEL / TOKYO ELECTRON

    ALPHA(α)-303i

    verified-listing-icon

    已验证

    类别
    Furnaces / Diffusion

    上次验证: 60 多天前

    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    51950


    晶圆尺寸:

    12"/300mm


    年份:

    2006


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    TEL / TOKYO ELECTRON ALPHA(α)-303i

    TEL / TOKYO ELECTRON

    ALPHA(α)-303i

    Furnaces / Diffusion
    年份: 2008状况: 二手
    上次验证20 天前

    TEL / TOKYO ELECTRON

    ALPHA(α)-303i

    verified-listing-icon
    已验证
    类别
    Furnaces / Diffusion
    上次验证: 60 多天前
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    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    51950


    晶圆尺寸:

    12"/300mm


    年份:

    2006


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    说明
    FURNACE
    配置
    K type / Poly
    OEM 型号描述
    The Alpha-303i is a 300mm production tool developed by Tokyo Electron. It is the result of years of research and development, with TEL having completed their 300mm batch furnace prototype in 1995. Since then, TEL has delivered numerous atmospheric and LP CVD systems to multiple customer sites and consortia worldwide. The Alpha-303i includes key features such as a 100 product wafer load size, a high-speed multiple-wafer loading system with optical notch alignment, and a Front-Opening Unified Pod (FOUP) interface that is configurable for overhead transfer systems (OHT) and personal guided vehicles (PGV). Additionally, boat rotation is standard on all processes, and a Fast Thermal Processing System (FTP) is available for both atmospheric and CVD systems. This tool reinforces TEL’s commitment to being production ready for the 300mm era of semiconductor manufacturing.
    文件

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