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说明
Installed Working Condition.配置
Type: NV8200P Dose2 Block3 Energy Config: 0 - 250Kv Midcurrent CE-Conformity: Yes Cryo-Pumps: 3x CTI Onboard 8 Cryo-Kompressor: CTI 9650 Low-Voltage Turbo-Pumps: Leybold: LH600C + LH1000C + LH151C Rough-Pumps: Edwards: ODP40 + QDP40 + IQDP80/QMB250 Wafersize: 8inch(200mm) Clamp-Type: E-Chuck with Non-μC Controller Wafer-Cooling: Galden HT110 with 20 degree Heatexchanger Gasbox: 3x Toxic 0,5L Size String1: Argon Carriergas; SEC-4400 String2: BF3 SDS-Low-Pressure Type VCR 1/4"; Brooks String3: PH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640 String4: AsH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640 Beam-Profiler Type: Belt-Drive Gear-Type's: Scan: Harmonic Tilt: Harmonic Source-Type: ELS4 IHC-Source without Vaporizer HV-Transformer: Mineral-Oil Light-Tower: red/yellow/green; no buzzer Main-Workstation Solaris SUN AXI 4HE Second-Workstation Solaris SUN Sparc5 Software-Version: 5.1.4.1 Network: 24port 100MB Ethernet Cell-Controller: 177 TypeOEM 型号描述
NV-8200P, high current, parallel beam scan, uses GSD-A end station.文件
无文件
AXCELIS
NV 8200P
类别
High Current
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
39175
晶圆尺寸：
8"/200mm
年份：
1995
Logistics Support
Available
Money Back Guarantee
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Transaction Insured by Moov
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Refurbishment Services
Available
说明
Installed Working Condition.配置
Type: NV8200P Dose2 Block3 Energy Config: 0 - 250Kv Midcurrent CE-Conformity: Yes Cryo-Pumps: 3x CTI Onboard 8 Cryo-Kompressor: CTI 9650 Low-Voltage Turbo-Pumps: Leybold: LH600C + LH1000C + LH151C Rough-Pumps: Edwards: ODP40 + QDP40 + IQDP80/QMB250 Wafersize: 8inch(200mm) Clamp-Type: E-Chuck with Non-μC Controller Wafer-Cooling: Galden HT110 with 20 degree Heatexchanger Gasbox: 3x Toxic 0,5L Size String1: Argon Carriergas; SEC-4400 String2: BF3 SDS-Low-Pressure Type VCR 1/4"; Brooks String3: PH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640 String4: AsH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640 Beam-Profiler Type: Belt-Drive Gear-Type's: Scan: Harmonic Tilt: Harmonic Source-Type: ELS4 IHC-Source without Vaporizer HV-Transformer: Mineral-Oil Light-Tower: red/yellow/green; no buzzer Main-Workstation Solaris SUN AXI 4HE Second-Workstation Solaris SUN Sparc5 Software-Version: 5.1.4.1 Network: 24port 100MB Ethernet Cell-Controller: 177 TypeOEM 型号描述
NV-8200P, high current, parallel beam scan, uses GSD-A end station.文件
无文件