说明
Installed Working Condition.配置
Type: NV8200P Dose2 Block3 Energy Config: 0 - 250Kv Midcurrent CE-Conformity: Yes Cryo-Pumps: 3x CTI Onboard 8 Cryo-Kompressor: CTI 9650 Low-Voltage Turbo-Pumps: Leybold: LH600C + LH1000C + LH151C Rough-Pumps: Edwards: ODP40 + QDP40 + IQDP80/QMB250 Wafersize: 8inch(200mm) Clamp-Type: E-Chuck with Non-μC Controller Wafer-Cooling: Galden HT110 with 20 degree Heatexchanger Gasbox: 3x Toxic 0,5L Size String1: Argon Carriergas; SEC-4400 String2: BF3 SDS-Low-Pressure Type VCR 1/4"; Brooks String3: PH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640 String4: AsH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640 Beam-Profiler Type: Belt-Drive Gear-Type's: Scan: Harmonic Tilt: Harmonic Source-Type: ELS4 IHC-Source without Vaporizer HV-Transformer: Mineral-Oil Light-Tower: red/yellow/green; no buzzer Main-Workstation Solaris SUN AXI 4HE Second-Workstation Solaris SUN Sparc5 Software-Version: 5.1.4.1 Network: 24port 100MB Ethernet Cell-Controller: 177 TypeOEM 型号描述
NV-8200P, high current, parallel beam scan, uses GSD-A end station.文件
无文件
AXCELIS
NV 8200P
已验证
类别
High Current
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
39175
晶圆尺寸：
8"/200mm
年份：
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
AXCELIS
NV 8200P
类别
High Current
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
39175
晶圆尺寸：
8"/200mm
年份：
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Installed Working Condition.配置
Type: NV8200P Dose2 Block3 Energy Config: 0 - 250Kv Midcurrent CE-Conformity: Yes Cryo-Pumps: 3x CTI Onboard 8 Cryo-Kompressor: CTI 9650 Low-Voltage Turbo-Pumps: Leybold: LH600C + LH1000C + LH151C Rough-Pumps: Edwards: ODP40 + QDP40 + IQDP80/QMB250 Wafersize: 8inch(200mm) Clamp-Type: E-Chuck with Non-μC Controller Wafer-Cooling: Galden HT110 with 20 degree Heatexchanger Gasbox: 3x Toxic 0,5L Size String1: Argon Carriergas; SEC-4400 String2: BF3 SDS-Low-Pressure Type VCR 1/4"; Brooks String3: PH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640 String4: AsH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640 Beam-Profiler Type: Belt-Drive Gear-Type's: Scan: Harmonic Tilt: Harmonic Source-Type: ELS4 IHC-Source without Vaporizer HV-Transformer: Mineral-Oil Light-Tower: red/yellow/green; no buzzer Main-Workstation Solaris SUN AXI 4HE Second-Workstation Solaris SUN Sparc5 Software-Version: 5.1.4.1 Network: 24port 100MB Ethernet Cell-Controller: 177 TypeOEM 型号描述
NV-8200P, high current, parallel beam scan, uses GSD-A end station.文件
无文件