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Description Dimension Qty End station 115 x 94 x 98 1 Beam line 52 x 96 x 94 1 Source teminal 59 x 60 x 89 1 Source housing 66 x 97 x 86 1 Analyzer 39 x 36 x 68 1 Power rack1 71 x 31 x 98 1 Power rack2 24 x 33 x 88 1 Power rack3 24 x 26 x 87 1 Pallet-1: End station door / Front door, Misc parts etc 102 x 54 x 28 1 Pallet-2: Teminal door, Misc parts etc 96 x 56 x 26 1 Pallet-3: Beam door, Misc parts etc 116 x 43 x 27 1 Pallet-4: Top plate, Misc parts etc 114 x 45 x 27 1 Pallet-5: Side plate, Misc parts etc 54 x 60 x 32 1 Pallet-6: Hood cover, Top panel, Misc parts etc 100 x 72 x 29 1 Pallet-7: Stack, Lamp, Accessory, Misc parts etc 49 x 47 x 40 1 Pallet-8: Filter cover, Misc parts etc 80 x 53 x 35 1 Pallet-9: Filter 61 x 48 x 59 1 Pallet-10: Compressor, Stage 51 x 44 x 35 1 Pallet-11: Gas box 42 x 49 x 60 1 Pallet-12: Analyzer(spare) 42 x 49 x 12 1 Tote box-1: Helium Hose, Cables, Misc parts etc 40 x 49 x 34 1 Chiller 34 x 63 x 57 1 SMIF 17 x 24 x 75 1 Top plate 1 4 x 165 x 5 1 Top plate 2 4 x 165 x 5 1 Helium tube1,2 5 x 155 x 6 1 Bottom plate 1配置
PROCESS: HIGH ENERGY MOVING TYPE: DISK TYPE DRY PUMP : N/A CRYO PUMP : ON BOARD 250F CRYO PUMP ,ON BOARD 10,ON BOARD 8 COMPRESSOR : CTI 9600 , CTI 9600 TMP (TURBO PUMP) : LYBOLD 75M CHILLER : AFFINITY CCWA -200L-HE-3P LP , AFFINITY RWA -012J-BE03CB GAS : ARGON , ARSINE ,PHOSPHNEOEM 型号描述
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AXCELIS
NV GSD/HE
类别
High Current
上次验证： 20 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127805
晶圆尺寸：
8"/200mm
年份：
未知
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