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AXCELIS NV GSD/HE

说明

Axcelis NV-GSD-LED High Energy Ion Implanter

配置

See attachment for Ion Implant OEM : EATON MODEL : NV-GSD HE VINTAGE : N/A PROCESS: HIGH ENERGY MOVING TYPE: DISK TYPE DRY PUMP : N/A CRYO PUMP : ON BOARD 250F CRYO PUMP ,ON BOARD 10,ON BOARD 8 COMPRESSOR : CTI 9600 , CTI 9600 TMP (TURBO PUMP) : LYBOLD 75M CHILLER : AFFINITY CCWA -200L-HE-3P LP , AFFINITY RWA -012J-BE03CB GAS : ARGON , ARSINE ,PHOSPHNE OS : Solaris

OEM 型号描述

未提供

文件

EATON NV-GSD-HE PL (1).pdf

EATON NV-GSD-HE Configuration.pdf

AXCELIS

NV GSD/HE

已验证

类别

High Current

上次验证： 60 多天前

物品主要详细信息

状况：

Used

运行状况:

未知

产品编号：

105382

晶圆尺寸：

8"/200mm

年份：

未知

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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verified-listing-icon

已验证

类别

High Current

上次验证： 60 多天前

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物品主要详细信息

状况：

Used

运行状况:

未知

产品编号：

105382

晶圆尺寸：

8"/200mm

年份：

未知

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

说明

Axcelis NV-GSD-LED High Energy Ion Implanter

配置

See attachment for Ion Implant OEM : EATON MODEL : NV-GSD HE VINTAGE : N/A PROCESS: HIGH ENERGY MOVING TYPE: DISK TYPE DRY PUMP : N/A CRYO PUMP : ON BOARD 250F CRYO PUMP ,ON BOARD 10,ON BOARD 8 COMPRESSOR : CTI 9600 , CTI 9600 TMP (TURBO PUMP) : LYBOLD 75M CHILLER : AFFINITY CCWA -200L-HE-3P LP , AFFINITY RWA -012J-BE03CB GAS : ARGON , ARSINE ,PHOSPHNE OS : Solaris

OEM 型号描述

未提供

文件

文件图标

EATON NV-GSD-HE PL (1).pdf

文件图标

EATON NV-GSD-HE Configuration.pdf

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