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Description Dimension Qty End station 120 x 95 x 102 1 Beam line 52 x 96 x 94 1 Source teminal 59 x 60 x 89 1 Source housing 66 x 97 x 86 1 Analyzer 25 x 35 x 35 1 Power rack1 71 x 31 x 102 1 Power rack2 28 x 29 x 85 1 Power rack3 25 x 35 x 85 1 Gas box 42 x 49 x 60 1 Pallet-1: End station door, Misc parts etc 56 x 115 x 33 1 Pallet-2: Teminal door, Hose, Cables 58 x 86 x 29 1 Pallet-3: Top plate, Misc parts etc 76 x 83 x 38 1 Pallet-4: Generator, Stack 42 x 49 x 28 1 Pallet-5: Beam door, Misc parts etc 61 x 90 x 35 1 Pallet-6: Door, Filter, Misc parts etc 56 x 104 x 35 1 Pallet-7: Lamp, Filter 42 x 49 x 31 1 Pallet-8: Manual, Accessories, Misc parts etc 58 x 38 x 35 1 Pallet-9: Compressor 50 x 50 x 29 1 PC, Monitor, Rack 46 x 25 x 49 1 Chiller 34 x 63 x 57 1 SMIF 17 x 24 x 75 1 Top plate 1 4 x 165 x 5 1 Top plate 2 4 x 165 x 5 1 Bottom plate 1配置
PROCESS: HIGH ENERGY MOVING TYPE: DISK TYPE DRY PUMP : N/A CRYO PUMP : CTI ON BOARD 250F , CTI ON BOARD 10 , CTI ON BOARD 8 COMPRESSOR : CTI 9600 , CTI 9600 TMP (TURBO PUMP) : LYBOLD 75M CHILLER : AFFINITY RWA-012J-BE03CB , AFFINITY CWA-200L-MO15CBD GAS : ARGON , ARSINE ,PHOSPHNEOEM 型号描述
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AXCELIS
NV GSD/HE
类别
High Current
上次验证： 20 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127792
晶圆尺寸：
8"/200mm
年份：
1999
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