说明
High Current Implanter Is System On-Line? Yes Can Produce Wafers As-Is ? No CE Mark Certified ? Yes Overall Tool Condition Any Field Modifications ? No All Cables present ? Yes Any Corrosion visible on modules ? No Any Missing / Damaged Parts ? No Wafer Handler Yes Handler Type # of Cassette / FOUP Loaders FOUP Loaders End-Effecter Type 150mm Single Pre-Aligner ? Yes Mini-Environment Yes Handler Options ? 150mm Hot chuck System Software System SW (OS) version Windows 10 System SW (App) version 3.8.3.0.2 Log-In User Name Sysadmin Log-In Password sysadmin SEMI Std Options (E84, E99, etc..) E84 HSMS Yes Supporting Equipment Ext Transformer No UPS No Heat Exchanger / Chiller Chiller Facility Requirements CDA Yes DIW Yes Gas GN2,PN2,Ar Power 480V 3phase 5Wire配置
无配置OEM 型号描述
未提供文件
无文件
类别
High Current
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
135057
晶圆尺寸：
6"/150mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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AXCELIS
PURION H200
类别
High Current
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
135057
晶圆尺寸：
6"/150mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
High Current Implanter Is System On-Line? Yes Can Produce Wafers As-Is ? No CE Mark Certified ? Yes Overall Tool Condition Any Field Modifications ? No All Cables present ? Yes Any Corrosion visible on modules ? No Any Missing / Damaged Parts ? No Wafer Handler Yes Handler Type # of Cassette / FOUP Loaders FOUP Loaders End-Effecter Type 150mm Single Pre-Aligner ? Yes Mini-Environment Yes Handler Options ? 150mm Hot chuck System Software System SW (OS) version Windows 10 System SW (App) version 3.8.3.0.2 Log-In User Name Sysadmin Log-In Password sysadmin SEMI Std Options (E84, E99, etc..) E84 HSMS Yes Supporting Equipment Ext Transformer No UPS No Heat Exchanger / Chiller Chiller Facility Requirements CDA Yes DIW Yes Gas GN2,PN2,Ar Power 480V 3phase 5Wire配置
无配置OEM 型号描述
未提供文件
无文件