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说明
无说明配置
(1) General E500 Medium Current Ion Implanter (HP/EHP/EHPi) E-1000 Wafer size 8 inches Serial no. / Vintage IMP-039 / 1997 (2) Gas cabinet Gas cylinder volume (liter) HP Ar (External or Internal) External AsH3 cylinder type (HP or SDS) SDS PH3 cylinder type (HP or SDS) SDS BF3 cylinder type (HP or SDS) SDS Gas line purge YES Vaporizer P.S. (Yes or No) None (3) Source Source head type ELS (4) Beamline Scan generator YES Automatic Graded Decel - Decel relay & P/S (Yes or No) YES Hall Probe (Yes or No) YES Beam Energy Probe (Yes or No) YES (5) End station END STATION MODEL DISK VESDA Smoke Detectors (Yes or No) NO(STANDARD) Service Monitor (Yes or No) Yes Software Version N/A (6) High Voltage Extraction Power Supply 0 keV ~ 60keV Acceleration Power Supply 0 keV ~ 120keVOEM 型号描述
The Varian E1000 is a high current implanter that leverages Varian’s pioneering single-wafer high current technology to deliver high yields and the industry’s best productivity. Innovations on the dual-magnet ribbon beam architecture improve beam line transmission, on-wafer beam utilization, and beam current output.文件
无文件
类别
High Current
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
106506
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT) / VARIAN
E1000
类别
High Current
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
106506
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
(1) General E500 Medium Current Ion Implanter (HP/EHP/EHPi) E-1000 Wafer size 8 inches Serial no. / Vintage IMP-039 / 1997 (2) Gas cabinet Gas cylinder volume (liter) HP Ar (External or Internal) External AsH3 cylinder type (HP or SDS) SDS PH3 cylinder type (HP or SDS) SDS BF3 cylinder type (HP or SDS) SDS Gas line purge YES Vaporizer P.S. (Yes or No) None (3) Source Source head type ELS (4) Beamline Scan generator YES Automatic Graded Decel - Decel relay & P/S (Yes or No) YES Hall Probe (Yes or No) YES Beam Energy Probe (Yes or No) YES (5) End station END STATION MODEL DISK VESDA Smoke Detectors (Yes or No) NO(STANDARD) Service Monitor (Yes or No) Yes Software Version N/A (6) High Voltage Extraction Power Supply 0 keV ~ 60keV Acceleration Power Supply 0 keV ~ 120keVOEM 型号描述
The Varian E1000 is a high current implanter that leverages Varian’s pioneering single-wafer high current technology to deliver high yields and the industry’s best productivity. Innovations on the dual-magnet ribbon beam architecture improve beam line transmission, on-wafer beam utilization, and beam current output.文件
无文件