
说明
implanter配置
Equipment size: * Main body approx. 8300 x 3300 (plus 650 mm when the door opens) * Exterior devices approx. 2950 x 850 (plus 1400 mm when the door opens) Configuration: * ESC temperature confirmation (A series high temperature and B series normal temperature) A: 500℃ B: 24℃ * Energy range: Monovalent → 350keV, Divalent → 700keV Compatible with double/triple chargeOEM 型号描述
未提供文件
无文件
类别
Ion Implantation
上次验证: 10 天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
139224
晶圆尺寸:
4"/100mm
年份:
2010
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ULVAC
IH-860DSIC
类别
Ion Implantation
上次验证: 10 天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
139224
晶圆尺寸:
4"/100mm
年份:
2010
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
implanter配置
Equipment size: * Main body approx. 8300 x 3300 (plus 650 mm when the door opens) * Exterior devices approx. 2950 x 850 (plus 1400 mm when the door opens) Configuration: * ESC temperature confirmation (A series high temperature and B series normal temperature) A: 500℃ B: 24℃ * Energy range: Monovalent → 350keV, Divalent → 700keV Compatible with double/triple chargeOEM 型号描述
未提供文件
无文件