说明
Version 1配置
无配置OEM 型号描述
The RAITH150 is a multipurpose tool that can perform direct e-beam exposure and wafer scale process development at suboptical resolution. It includes integrated linewidth and metrology functions that optimize process reproducibility. The SEM side can be used to obtain large high magnification tiled images by taking advantage of the high resolution interferometer stage.文件
无文件
类别
Lithography
上次验证： 8 天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
153724
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
RAITH
150 E BEAM
类别
Lithography
上次验证： 8 天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
153724
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Version 1配置
无配置OEM 型号描述
The RAITH150 is a multipurpose tool that can perform direct e-beam exposure and wafer scale process development at suboptical resolution. It includes integrated linewidth and metrology functions that optimize process reproducibility. The SEM side can be used to obtain large high magnification tiled images by taking advantage of the high resolution interferometer stage.文件
无文件