说明
无说明配置
Kloé UV-KUB 3, 6-inch mask aligner. 365 nm UV-LED exposure source, 35 mW/cm². Accepts substrates up to 6” and photomasks up to 7”. Resolution 1 µm with 1 µm alignment accuracy. Dual CCD camera alignment system, touchscreen interface, USB control joypad and embedded PC with automatic pre-alignment and alignment-mark storage. XYZ/θ motorised substrate positioning. Compatible with standard photoresists including AZ, Shipley and SU-8. Compact standalone system.OEM 型号描述
The mask aligner UV-KUB 3 is the first mask alignment system equipped with a UV-LED light source, that provide an unrivalled collimation and homogeneous exposure, on the international market. Compact, easy to use and efficient, the mask alignment system UV-KUB 3 allows alignment up to 7" photolithography mask with substrates up to 6" in a cube volume of 48cm size.文件
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
153121
晶圆尺寸：
6"/150mm
HDD / Software:
Yes
Exposure:
Contact / proximity UV photolithography using collimated UV-LED exposure
Alignment:
CCD camera video alignment with motorised XYZ/θ positioning, joystick control and automatic pre-alignment
Light Source:
365 nm UV LED, 35 mW/cm², monochromatic collimated source
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLOE
UV-KUB 3
类别
Mask/Bond Aligners
上次验证： 5 天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Running
产品编号：
153121
晶圆尺寸：
6"/150mm
HDD / Software:
Yes
Exposure:
Contact / proximity UV photolithography using collimated UV-LED exposure
Alignment:
CCD camera video alignment with motorised XYZ/θ positioning, joystick control and automatic pre-alignment
Light Source:
365 nm UV LED, 35 mW/cm², monochromatic collimated source
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available