说明
Medium Current Ion Implanter配置
-set up for 150 mm open wafer cassette loading -Gasbox for AsH3, PH3 and BF3OEM 型号描述
Purion M medium current ion implant system. This system offer industry leading purity, precision and productivity through enhanced single magnet scanned spot beam architecture at a higher productivity (500 wafer per hour throughput) and lower cost of ownership than competitive offerings, in addition to other advantages.文件
无文件
AXCELIS
PURION M
类别
Medium Current
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
132929
晶圆尺寸：
6"/150mm
年份：
2024
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Medium Current Ion Implanter配置
-set up for 150 mm open wafer cassette loading -Gasbox for AsH3, PH3 and BF3OEM 型号描述
Purion M medium current ion implant system. This system offer industry leading purity, precision and productivity through enhanced single magnet scanned spot beam architecture at a higher productivity (500 wafer per hour throughput) and lower cost of ownership than competitive offerings, in addition to other advantages.文件
无文件