说明
Missing Parts: Robot controller, cathode power supply, filament power supply, monitor, RP3, ion gauge controller (cable), L/R side cup BNC cable, source filament power supply配置
Accessories: Decontamination system (shared with IG103), Process gases: Ar, PH3, AsH3, BF3OEM 型号描述
未提供文件
无文件
类别
Medium Current
上次验证： 14 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
143531
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SEN CORPORATION / SUMITOMO
MC3-II/CM
类别
Medium Current
上次验证： 14 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
143531
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Missing Parts: Robot controller, cathode power supply, filament power supply, monitor, RP3, ion gauge controller (cable), L/R side cup BNC cable, source filament power supply配置
Accessories: Decontamination system (shared with IG103), Process gases: Ar, PH3, AsH3, BF3OEM 型号描述
未提供文件
无文件