说明
Date of last Maintenance and Shutdown - 9/24配置
Bernas Ion Source Open Cassette Software - 15.10 Rev A RW DVD Floppy Drive Remote Service Monitor SECS/GEM Cooled Platen OnBoard Cryos Cryo N2 Heater SDS Signal Tower Beam Energy Probe Beam Purity Check Software Fast Parametric Software Hall Probe Reversing Source Magnet 15amp Arc Power Supply EHP Beam Current EHP Source Bushing EHP Metals Kit 10” Target Cryo Load Lock Turbos (EHP) V-250 Load Lock Turbo EHP Wafer Handler Sensors Cassette/Tilt Sensor Upgrade Cassette Present Sensor Cassette Interlock Upgrade Wafer Position Detect 190KeV Scanning Faraday Cooled Setup Faraday Faraday Limit Sensor Exhaust Leak Detector Grounding Rod Upgrade Kit CTI 9600 Cryo Compressor IQDP80 Vacuum PumpOEM 型号描述
The E500-EHP is a medium current ion implanter made by AMAT (Varian). It processes one or two cassettes of wafers as a batch, a single wafer at a time.文件
无文件
类别
Medium Current
上次验证： 13 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
144600
晶圆尺寸：
4"/100mm, 6"/150mm, 8"/200mm
年份：
2003
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT) / VARIAN
E500-EHP
类别
Medium Current
上次验证： 13 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
144600
晶圆尺寸：
4"/100mm, 6"/150mm, 8"/200mm
年份：
2003
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Date of last Maintenance and Shutdown - 9/24配置
Bernas Ion Source Open Cassette Software - 15.10 Rev A RW DVD Floppy Drive Remote Service Monitor SECS/GEM Cooled Platen OnBoard Cryos Cryo N2 Heater SDS Signal Tower Beam Energy Probe Beam Purity Check Software Fast Parametric Software Hall Probe Reversing Source Magnet 15amp Arc Power Supply EHP Beam Current EHP Source Bushing EHP Metals Kit 10” Target Cryo Load Lock Turbos (EHP) V-250 Load Lock Turbo EHP Wafer Handler Sensors Cassette/Tilt Sensor Upgrade Cassette Present Sensor Cassette Interlock Upgrade Wafer Position Detect 190KeV Scanning Faraday Cooled Setup Faraday Faraday Limit Sensor Exhaust Leak Detector Grounding Rod Upgrade Kit CTI 9600 Cryo Compressor IQDP80 Vacuum PumpOEM 型号描述
The E500-EHP is a medium current ion implanter made by AMAT (Varian). It processes one or two cassettes of wafers as a batch, a single wafer at a time.文件
无文件