说明
Dark-field laser surface-defect monitor配置
Detection method: Dark-field laser scatter PSL sensitivity: 0.152 µm (152 nm) Size classes: 0.15 / 0.2 / 0.3 / 0.5 / 1.0 / 3.0 / 5.0 µm+ Scan motion: XY stage; substrate moves under the objective Output: XY defect map and size-class histogram Data storage: Scan files recalled from database Edge exclusion: Configurable in millimeters Reticle / mask: Glass-side scanning with system modification Pellicle: Feasibility testing available Non-silicon substrates: Substrate-specific PSL calibration required for accurate size classification Controller: Integrated laptop and software Power: 115 VAC Vacuum: Facility supply requiredOEM 型号描述
The SDM-100xy is a dark-field laser surface defect monitor capable of scanning 150mm–200mm silicon wafers, reticles, photomasks, and glass substrates. Scanning the glass side of a reticle is within capability with minor modifications; pellicle scanning feasibility can be tested. All non-silicon materials require a specific calibration to ensure accurate defect size classification.文件
无文件
类别
Metrology
上次验证： 3 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
153184
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SILVER SAGE PRECISION
SDMxy100
类别
Metrology
上次验证： 3 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
153184
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Dark-field laser surface-defect monitor配置
Detection method: Dark-field laser scatter PSL sensitivity: 0.152 µm (152 nm) Size classes: 0.15 / 0.2 / 0.3 / 0.5 / 1.0 / 3.0 / 5.0 µm+ Scan motion: XY stage; substrate moves under the objective Output: XY defect map and size-class histogram Data storage: Scan files recalled from database Edge exclusion: Configurable in millimeters Reticle / mask: Glass-side scanning with system modification Pellicle: Feasibility testing available Non-silicon substrates: Substrate-specific PSL calibration required for accurate size classification Controller: Integrated laptop and software Power: 115 VAC Vacuum: Facility supply requiredOEM 型号描述
The SDM-100xy is a dark-field laser surface defect monitor capable of scanning 150mm–200mm silicon wafers, reticles, photomasks, and glass substrates. Scanning the glass side of a reticle is within capability with minor modifications; pellicle scanning feasibility can be tested. All non-silicon materials require a specific calibration to ensure accurate defect size classification.文件
无文件