说明
Wafer / Reticle inspection .15um particle detection / bare silicon配置
Wafer / Reticle scanner 100mm - 200mm .15 um particle detection / newOEM 型号描述
The SDM-100xy is a dark-field laser surface defect monitor capable of scanning 150mm–200mm silicon wafers, reticles, photomasks, and glass substrates. Scanning the glass side of a reticle is within capability with minor modifications; pellicle scanning feasibility can be tested. All non-silicon materials require a specific calibration to ensure accurate defect size classification.文件
无文件
类别
Metrology
上次验证： 3 天前
物品主要详细信息
状况：
New
运行状况:
Installed / Running
产品编号：
153188
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SILVER SAGE PRECISION
SDMxy100
类别
Metrology
上次验证： 3 天前
物品主要详细信息
状况：
New
运行状况:
Installed / Running
产品编号：
153188
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Wafer / Reticle inspection .15um particle detection / bare silicon配置
Wafer / Reticle scanner 100mm - 200mm .15 um particle detection / newOEM 型号描述
The SDM-100xy is a dark-field laser surface defect monitor capable of scanning 150mm–200mm silicon wafers, reticles, photomasks, and glass substrates. Scanning the glass side of a reticle is within capability with minor modifications; pellicle scanning feasibility can be tested. All non-silicon materials require a specific calibration to ensure accurate defect size classification.文件
无文件