说明
AMEC PD5 MOCVD配置
System Configuration: ▪ Process Application: GaN Epitaxy ▪ Vintage: Oct 2020 ▪ Wafer Type: 11x4”, 6x6”, 3x8” GaN on Silicon/SiC ▪ Transfer Module: Yes, able to support up to 4 chambers ▪ Pump: Edwards iXH645H ▪ Chiller: SMC ▪ MFCs Type: Horiba ▪ MO Configuration: TMGa1/2, TMAl1/2, TEGa, Cp2Fe, TMIn, Cp2Mg ▪ Doping Source: 2x External Dopant inlet ▪ Inline Purifiers: H2, N2, NH3 ▪ Dew Point Sensor: H2, N2 Process Startup: ▪ Process demonstration for Breakdown Voltage >650V ▪ 650V HEMT recipe will be providedOEM 型号描述
MOCVD system for production of GaN power devices文件
类别
MOCVD
上次验证： 12 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
139498
晶圆尺寸：
未知
年份：
2020
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA (AMEC)
Prismo PD5
类别
MOCVD
上次验证： 12 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
139498
晶圆尺寸：
未知
年份：
2020
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available