
说明
KLA OVERLAY配置
无配置OEM 型号描述
The KLA-Tencor 5200XP is an automated overlay metrology tool for the semiconductor industry. It improves overlay control, maximizes lithography tool utilization, and meets the requirements of 0.18 µm design rules. It has the highest throughput in the industry and is compatible with current factory automation standards.文件
无文件
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5200XP
类别
Overlay
上次验证: 29 天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
128005
晶圆尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
KLA OVERLAY配置
无配置OEM 型号描述
The KLA-Tencor 5200XP is an automated overlay metrology tool for the semiconductor industry. It improves overlay control, maximizes lithography tool utilization, and meets the requirements of 0.18 µm design rules. It has the highest throughput in the industry and is compatible with current factory automation standards.文件
无文件