说明
Overlay measurement system配置
无配置OEM 型号描述
Archer AIM is an Advanced Optical Overlay Metrology product that improves stepper correction accuracy, provides precise data, and enables design rule segmentation. It delivers industry-leading precision performance, reduces total measurement uncertainty, and increases sampling rate. It also includes offline automatic recipe creation and real-time analysis software. The MPX option enables ‘on product’ monitoring of focus-exposure. Archer AIM targets new standards for lithography process control for 65-nm and beyond, reducing measurement uncertainty and enabling control of overlay error budgets. It integrates with KLA-Tencor’s software management products to provide comprehensive optical overlay metrology process control.文件
无文件
KLA
ARCHER AIM
已验证
类别
Overlay
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
49249
晶圆尺寸：
12"/300mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
ARCHER AIM
类别
Overlay
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
49249
晶圆尺寸：
12"/300mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Overlay measurement system配置
无配置OEM 型号描述
Archer AIM is an Advanced Optical Overlay Metrology product that improves stepper correction accuracy, provides precise data, and enables design rule segmentation. It delivers industry-leading precision performance, reduces total measurement uncertainty, and increases sampling rate. It also includes offline automatic recipe creation and real-time analysis software. The MPX option enables ‘on product’ monitoring of focus-exposure. Archer AIM targets new standards for lithography process control for 65-nm and beyond, reducing measurement uncertainty and enabling control of overlay error budgets. It integrates with KLA-Tencor’s software management products to provide comprehensive optical overlay metrology process control.文件
无文件