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市场 > Overlay > KLA > ARCHER 600

ARCHER 600

类别
Overlay
概述

To help achieve sub-3nm overlay error for advanced logic and memory devices KLA introduced the Archer 600 imaging-based overlay metrology system. New optics in combination with innovative ProAIM targets deliver better resilience to process variations and improved correlation between measurement target and actual device pattern overlay errors, producing more accurate overlay measurements.

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