说明
Overlay Measurement System配置
Archer TL150i main attributes / components - • Archer TL150i is a high-performance overlay metrology tool for advanced technology nodes, enabling OPO requirements below 2.5nm. Its unique pupil-based scatterometry configuration, combined with full spectrum wave tuning capability, enables customized selection of working wavelength and bandwidth per layer. This results in optimized performance for the most accurate and robust measurement. Archer TL150i is equipped with an ultra-high brightness super-continuum laser, providing high speed scanning of the overlay cell, and a small spot for minimizing cell-edge effects. It is also equipped with an ADS (active damping system) enhanced stage, allowing faster motion and reduced measurement noise. Combined with new advanced algorithms that use multiple signals to improve measurement accuracy, Archer TL150i provides best in class overlay results.OEM 型号描述
未提供文件
无文件
KLA
ATL150i
类别
Overlay
上次验证： 3 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
155068
晶圆尺寸：
12"/300mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Overlay Measurement System配置
Archer TL150i main attributes / components - • Archer TL150i is a high-performance overlay metrology tool for advanced technology nodes, enabling OPO requirements below 2.5nm. Its unique pupil-based scatterometry configuration, combined with full spectrum wave tuning capability, enables customized selection of working wavelength and bandwidth per layer. This results in optimized performance for the most accurate and robust measurement. Archer TL150i is equipped with an ultra-high brightness super-continuum laser, providing high speed scanning of the overlay cell, and a small spot for minimizing cell-edge effects. It is also equipped with an ADS (active damping system) enhanced stage, allowing faster motion and reduced measurement noise. Combined with new advanced algorithms that use multiple signals to improve measurement accuracy, Archer TL150i provides best in class overlay results.OEM 型号描述
未提供文件
无文件