说明
Defective or missing parts: Defective Part Name Linear Pulse Motor (Slider Unit) LP1: Clamp Drive Motor Finger Door Node PCB Assembly LP1: Manual Operation Switch Assembly (Operation Access Button) NRM3100SP Z-Axis Mechanism Assembly Hold-down Node PCB Robot Vacuum Solenoid Center-up Vacuum Solenoid CCD Camera Unit Missing Part Name SPS-PWR SUPPLY 575W Power Supply (PC Power Supply) 4-axis robot Wavelength selection filter (J-line) Interface board for NRM-3100 (LDSD) Node hold-down assembly (PCB) Load port Z-axis motor Linear pulse motor Arm Linear Pulse Motor HUB ATR9100 2P Failure Theta-axis motor Dock/Undock motor unit Linear pulse motor Stage X-axis Ball Screw Cover Center-up Unit配置
无配置OEM 型号描述
NRM-3100 overlay measurement system.文件
无文件
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NIKON
NRM-3100
类别
Overlay
上次验证： 18 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
148669
晶圆尺寸：
12"/300mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Defective or missing parts: Defective Part Name Linear Pulse Motor (Slider Unit) LP1: Clamp Drive Motor Finger Door Node PCB Assembly LP1: Manual Operation Switch Assembly (Operation Access Button) NRM3100SP Z-Axis Mechanism Assembly Hold-down Node PCB Robot Vacuum Solenoid Center-up Vacuum Solenoid CCD Camera Unit Missing Part Name SPS-PWR SUPPLY 575W Power Supply (PC Power Supply) 4-axis robot Wavelength selection filter (J-line) Interface board for NRM-3100 (LDSD) Node hold-down assembly (PCB) Load port Z-axis motor Linear pulse motor Arm Linear Pulse Motor HUB ATR9100 2P Failure Theta-axis motor Dock/Undock motor unit Linear pulse motor Stage X-axis Ball Screw Cover Center-up Unit配置
无配置OEM 型号描述
NRM-3100 overlay measurement system.文件
无文件