说明
Deposition System配置
Dual loadlock EFEM, robot installed Transfer module (TM), robot installed Process modules: - CHA PECVD TEOS chamber with (Qty 2) heaters - CHB PECVD TEOS chamber with (Qty 2) heatersOEM 型号描述
Our Producer platform is the fastest and most cost-effective in the industry, capable of processing more than three wafers every minute in a highly compact footprint. It features a robot that can simultaneously transfer four wafers between its three paired processing stations and unique double-decker vacuum loadlocks.文件
无文件
类别
PECVD
上次验证： 13 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
152527
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
PRODUCER III
类别
PECVD
上次验证： 13 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
152527
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Deposition System配置
Dual loadlock EFEM, robot installed Transfer module (TM), robot installed Process modules: - CHA PECVD TEOS chamber with (Qty 2) heaters - CHB PECVD TEOS chamber with (Qty 2) heatersOEM 型号描述
Our Producer platform is the fastest and most cost-effective in the industry, capable of processing more than three wafers every minute in a highly compact footprint. It features a robot that can simultaneously transfer four wafers between its three paired processing stations and unique double-decker vacuum loadlocks.文件
无文件