说明
无说明配置
Technical Specifications •Handles up to 200mm wafer diameter •lower temperatures (180° to 400°C) • Thicker films (≥20µm) Key Applications •low k • thermal films, high-temperature PECVD •SiO2,SiON,SiNx,A-Si •APF(Advance patterning film) •NFARL (nitrogen free anti-reflective layer) ASSETS OF PRODUCER III 1 AMAt TC Producer Model: Producer III 2 AMAt TC Producer Model: SE Carbon (GST) NIL 3 Heat Exchanger Model: SteelHead-0 4 DPA RF Generator Model: DPG-10 5 Amat Producer Gas Panel NIL 6 Dry Gas Abatement System Model: CS195SC 7 Dry Vacuum Pump Model:ADS602P 8 Dry Vacuum Pump Model:ADS602P 9 Dry Vacuum Pump Model:ADS602P 10 3 Phase Transformer of 160 kVAOEM 型号描述
Our Producer platform is the fastest and most cost-effective in the industry, capable of processing more than three wafers every minute in a highly compact footprint. It features a robot that can simultaneously transfer four wafers between its three paired processing stations and unique double-decker vacuum loadlocks.文件
类别
PECVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
131951
晶圆尺寸：
8"/200mm
年份：
2008
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
PRODUCER III
类别
PECVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
131951
晶圆尺寸：
8"/200mm
年份：
2008
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available