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LAM RESEARCH / NOVELLUS CONCEPT THREE "C3" SPEED
  • LAM RESEARCH / NOVELLUS CONCEPT THREE "C3" SPEED
  • LAM RESEARCH / NOVELLUS CONCEPT THREE "C3" SPEED
  • LAM RESEARCH / NOVELLUS CONCEPT THREE "C3" SPEED
说明
CVD
配置
无配置
OEM 型号描述
The Novellus Concept Three Speed is an advanced system designed for 300 mm wafers, boasting a proprietary hemispherical ion source and bi-polar electrostatic chuck. These innovative features ensure superior ion uniformity and precise temperature control. Even as the elements are scaled up for 300 mm wafers, the ion uniformity remains consistent due to the inherent design characteristics of the ion source. Additionally, an optimized gas delivery system enhances the overall within-wafer uniformity, further improving the system's performance.
文件

无文件

类别
PECVD

上次验证: 60 多天前

物品主要详细信息

状况:

Used


运行状况:

未知


产品编号:

72725


晶圆尺寸:

12"/300mm


年份:

2000


Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

LAM RESEARCH / NOVELLUS

CONCEPT THREE "C3" SPEED

verified-listing-icon
已验证
类别
PECVD
上次验证: 60 多天前
listing-photo-4937e41415914ff18b274eca7eff1b72-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
物品主要详细信息

状况:

Used


运行状况:

未知


产品编号:

72725


晶圆尺寸:

12"/300mm


年份:

2000


Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
CVD
配置
无配置
OEM 型号描述
The Novellus Concept Three Speed is an advanced system designed for 300 mm wafers, boasting a proprietary hemispherical ion source and bi-polar electrostatic chuck. These innovative features ensure superior ion uniformity and precise temperature control. Even as the elements are scaled up for 300 mm wafers, the ion uniformity remains consistent due to the inherent design characteristics of the ion source. Additionally, an optimized gas delivery system enhances the overall within-wafer uniformity, further improving the system's performance.
文件

无文件