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说明
Oxford Instruments Plasmalab 800Plus RIE Plasma Processing System, 208V, 3ph, 50/60Hz. Includes: Thermo Neslab RTE Digital Plus recirculating chiller BOM# 271103200200; gas box; Leybold D65BCS PFPE vacuum pump w/ ARS 40-65 exhaust filter. 23in x 42in x 56in H.配置
无配置OEM 型号描述
The PlasmaPro 800Plus is a plasma etch and deposition solution that offers a large area for processing. It features an open loading design, making it easy to use and convenient to site, all while maintaining a compact footprint. The system is capable of handling full 300mm wafers or large batches of 43 x 50mm (2”) wafers, thanks to its 380mm or 460mm diameter table. This makes the PlasmaPro 800Plus a well-proven market-leading product that offers full production solutions without compromising on process quality.文件
无文件
类别
PECVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
123930
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
OXFORD
PLASMALAB 800 PLUS
类别
PECVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
123930
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Oxford Instruments Plasmalab 800Plus RIE Plasma Processing System, 208V, 3ph, 50/60Hz. Includes: Thermo Neslab RTE Digital Plus recirculating chiller BOM# 271103200200; gas box; Leybold D65BCS PFPE vacuum pump w/ ARS 40-65 exhaust filter. 23in x 42in x 56in H.配置
无配置OEM 型号描述
The PlasmaPro 800Plus is a plasma etch and deposition solution that offers a large area for processing. It features an open loading design, making it easy to use and convenient to site, all while maintaining a compact footprint. The system is capable of handling full 300mm wafers or large batches of 43 x 50mm (2”) wafers, thanks to its 380mm or 460mm diameter table. This makes the PlasmaPro 800Plus a well-proven market-leading product that offers full production solutions without compromising on process quality.文件
无文件