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OXFORD PLASMALAB 133 ICP 380
    说明
    无说明
    配置
    无配置
    OEM 型号描述
    The Oxford PLASMALAB 133 ICP 380 is a type of Ion Couple Plasma Etching System that features a 380 ICP Source. This system is designed with a manual load lock and a ceramic clamp style. It comes with an Alcatel Turbo pump and controller, a VAT Gate Valve and PM5 controller, an Endpoint Detector, and an RF power supply with match work and tuner. Additionally, it has eight Mass Flow Controllers.
    文件

    无文件

    类别
    PECVD

    上次验证: 60 多天前

    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    79019


    晶圆尺寸:

    未知


    年份:

    2009


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available

    OXFORD

    PLASMALAB 133 ICP 380

    verified-listing-icon
    已验证
    类别
    PECVD
    上次验证: 60 多天前
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    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    79019


    晶圆尺寸:

    未知


    年份:

    2009


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    说明
    无说明
    配置
    无配置
    OEM 型号描述
    The Oxford PLASMALAB 133 ICP 380 is a type of Ion Couple Plasma Etching System that features a 380 ICP Source. This system is designed with a manual load lock and a ceramic clamp style. It comes with an Alcatel Turbo pump and controller, a VAT Gate Valve and PM5 controller, an Endpoint Detector, and an RF power supply with match work and tuner. Additionally, it has eight Mass Flow Controllers.
    文件

    无文件