
说明
无说明配置
无配置OEM 型号描述
The Oxford PLASMALAB 133 ICP 380 is a type of Ion Couple Plasma Etching System that features a 380 ICP Source. This system is designed with a manual load lock and a ceramic clamp style. It comes with an Alcatel Turbo pump and controller, a VAT Gate Valve and PM5 controller, an Endpoint Detector, and an RF power supply with match work and tuner. Additionally, it has eight Mass Flow Controllers.文件
无文件
类别
PECVD
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
79019
晶圆尺寸:
未知
年份:
2009
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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PLASMALAB 133 ICP 380
类别
PECVD
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
79019
晶圆尺寸:
未知
年份:
2009
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
无配置OEM 型号描述
The Oxford PLASMALAB 133 ICP 380 is a type of Ion Couple Plasma Etching System that features a 380 ICP Source. This system is designed with a manual load lock and a ceramic clamp style. It comes with an Alcatel Turbo pump and controller, a VAT Gate Valve and PM5 controller, an Endpoint Detector, and an RF power supply with match work and tuner. Additionally, it has eight Mass Flow Controllers.文件
无文件