说明
Applications: -PECVD -Etch -Dielectric sputtering -Plasma polymer processes -Substrate biasing Benefits: -Enhances process flexibility -Improves throughput -Optimizes process control -Ensures high repeatability -Eases integration Features: -Sinusoidal RF output for low harmonic distribution -Wide operation frequency range for optimal process control -Tightly regulated output power -Low EMI/RFI -Remote operation capability Description: The PDX low-power series of mid-frequency power supplies offers a highly efficient, compact, easy-to-integrate source of power for a wide variety of process applications. These highly reliable power supplies enhance process flexibility, deliver a wide operating frequency range for optimized process control, ensure high process repeatability, and improve throughput.配置
The Unit's Serial Number Tag Reads: Part Number: 3156024-108C Serial Number: 350779 Revision: C Power Requirements: 208-230 VAC, 50/60 Hz, 1.4 kW Physical Specifications: Size: 89 mm H x 483 mm W x 483 mm D (3.5" x 19" x 20") Weight: < 14 kg (31 lb) Customer Interface: User port (no active front-panel controls) User Port Connector: 25-pin, sub-miniature D, male Serial Port Connector: None 50 W Output Connector and Load Match Output Connector: N or C Electrical Specifications: RF Output: 18 to 1250 W Frequency: 325 to 450 kHz Load Match Transformer: 10 to 350 Ω, 7 taps Internal Reactive Match: Inductor available Maximum Reflected Power: 250 W Harmonics: At full rated power, all harmonics are > 50 dB below the fundamental output frequency Input Voltage: 180 to 253 VAC, 50/60 Hz, Single Phase Input Current: 15 ARMS max Maximum Output Voltage: 300 V Maximum Output Current: 6 A Regulatory Accuracy: 1% of set point or 2 W, whichever is greater.OEM 型号描述
low-power series of mid-frequency power supplies文件
无文件
类别
Power Supplies
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
126431
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ADVANCED ENERGY
PDX 1250
类别
Power Supplies
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
126431
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Applications: -PECVD -Etch -Dielectric sputtering -Plasma polymer processes -Substrate biasing Benefits: -Enhances process flexibility -Improves throughput -Optimizes process control -Ensures high repeatability -Eases integration Features: -Sinusoidal RF output for low harmonic distribution -Wide operation frequency range for optimal process control -Tightly regulated output power -Low EMI/RFI -Remote operation capability Description: The PDX low-power series of mid-frequency power supplies offers a highly efficient, compact, easy-to-integrate source of power for a wide variety of process applications. These highly reliable power supplies enhance process flexibility, deliver a wide operating frequency range for optimized process control, ensure high process repeatability, and improve throughput.配置
The Unit's Serial Number Tag Reads: Part Number: 3156024-108C Serial Number: 350779 Revision: C Power Requirements: 208-230 VAC, 50/60 Hz, 1.4 kW Physical Specifications: Size: 89 mm H x 483 mm W x 483 mm D (3.5" x 19" x 20") Weight: < 14 kg (31 lb) Customer Interface: User port (no active front-panel controls) User Port Connector: 25-pin, sub-miniature D, male Serial Port Connector: None 50 W Output Connector and Load Match Output Connector: N or C Electrical Specifications: RF Output: 18 to 1250 W Frequency: 325 to 450 kHz Load Match Transformer: 10 to 350 Ω, 7 taps Internal Reactive Match: Inductor available Maximum Reflected Power: 250 W Harmonics: At full rated power, all harmonics are > 50 dB below the fundamental output frequency Input Voltage: 180 to 253 VAC, 50/60 Hz, Single Phase Input Current: 15 ARMS max Maximum Output Voltage: 300 V Maximum Output Current: 6 A Regulatory Accuracy: 1% of set point or 2 W, whichever is greater.OEM 型号描述
low-power series of mid-frequency power supplies文件
无文件