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说明
Tencor P-20(H) Step Height Measurement System - Long Scan Profiler Measurement. - Micro Head with L type stylus. - Installed in Clean-room.配置
- Measurement Range: 100 ~ 0.3mm Height. - Scan Length: 210mm. - Scan Speed : 1㎛ ~ 25 mm/sec. - Stylus Force: 1 ~100mg. - Motorized X-Y stage (max sample size:254x254mm). - 486DX PC & LCD Color Monitor, Windows 3.1. - Option: Precision Locator,Wafer Handler. - Utility: Vacuum. - Power: 110V/50HZ, 4A. - Anti-bivration table.OEM 型号描述
未提供文件
无文件
KLA
P-20H
类别
Profiler
上次验证： 60 多天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
65997
晶圆尺寸：
8"/200mm
年份：
未知
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说明
Tencor P-20(H) Step Height Measurement System - Long Scan Profiler Measurement. - Micro Head with L type stylus. - Installed in Clean-room.配置
- Measurement Range: 100 ~ 0.3mm Height. - Scan Length: 210mm. - Scan Speed : 1㎛ ~ 25 mm/sec. - Stylus Force: 1 ~100mg. - Motorized X-Y stage (max sample size:254x254mm). - 486DX PC & LCD Color Monitor, Windows 3.1. - Option: Precision Locator,Wafer Handler. - Utility: Vacuum. - Power: 110V/50HZ, 4A. - Anti-bivration table.OEM 型号描述
未提供文件
无文件