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EVATEC / UNAXIS / OERLIKON / BALZERS CLUSTERLINE 200
    说明
    Last processed 6” wafer was Oct’21, currently the tool is not running with power-off condition.
    配置
    6" , can be upgraded to 8" 2 chambers SiO2 Clusterline machine that consist of 2x LL(LoadLock/Loading module) + TM(transfer module) + 1x Aligner(detect wafer flat) + 2x PM(process chamber) + 3x Degasser. The process chamber had run gases of O2, SF6, Ar, He, N2O, N2, NH3, SiH4, H2. Only process chamber was deposited with Silicon Nitride/Silicon Oxide
    OEM 型号描述
    未提供
    文件

    无文件

    类别
    PVD / Sputtering

    上次验证: 60 多天前

    物品主要详细信息

    状况:

    Used


    运行状况:

    Installed / Running


    产品编号:

    102898


    晶圆尺寸:

    6"/150mm, 8"/200mm


    年份:

    2011


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available

    EVATEC / UNAXIS / OERLIKON / BALZERS

    CLUSTERLINE 200

    verified-listing-icon
    已验证
    类别
    PVD / Sputtering
    上次验证: 60 多天前
    listing-photo-860c6447aa954687929249cf4344583f-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51602/860c6447aa954687929249cf4344583f/901e0a9bc81d49d3be0196d530968eb3_76d7cda9ee1342778a3cb170069f3bcc1201a_mw.jpeg
    listing-photo-860c6447aa954687929249cf4344583f-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51602/860c6447aa954687929249cf4344583f/d74c21c0fed14537b7958f564d1b1469_8d5269196f3f477bb2ad3a6b452491ec1201a_mw.jpeg
    listing-photo-860c6447aa954687929249cf4344583f-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51602/860c6447aa954687929249cf4344583f/0bba004c5be547e893405f6186e906e1_d2d9920344fe45d196683c5169ac7a631201a_mw.jpeg
    listing-photo-860c6447aa954687929249cf4344583f-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51602/860c6447aa954687929249cf4344583f/969ad94d9760439ebcb5d44ead112fd7_f0208d8c649a4319a5c2f33260c34e1c_mw.jpeg
    listing-photo-860c6447aa954687929249cf4344583f-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51602/860c6447aa954687929249cf4344583f/854254f6e00f42f6935ddf1086edb5dc_9bbd819243114fac8925a6d7b03f0f5c1201a_mw.jpeg
    listing-photo-860c6447aa954687929249cf4344583f-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51602/860c6447aa954687929249cf4344583f/565d8f2bc4f549b39f854554f888b8f2_dc30db5ad9464e788e6957bdef59ecdd1201a_mw.jpeg
    listing-photo-860c6447aa954687929249cf4344583f-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51602/860c6447aa954687929249cf4344583f/1cf50331765c432ab4a3407ea287e7f8_d01a7ad30c4d43249e3f851691d98cbf1201a_mw.jpeg
    listing-photo-860c6447aa954687929249cf4344583f-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51602/860c6447aa954687929249cf4344583f/918bb33117bb41f6b37ce7d3f6345a7c_8468d0ffddcb449c9db8ffc993b583521201a_mw.jpeg
    listing-photo-860c6447aa954687929249cf4344583f-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/51602/860c6447aa954687929249cf4344583f/72fc1db4eb5947828ee82faf5de3c654_317307c32af94f4f8bc28013fcc25e54_mw.jpeg
    物品主要详细信息

    状况:

    Used


    运行状况:

    Installed / Running


    产品编号:

    102898


    晶圆尺寸:

    6"/150mm, 8"/200mm


    年份:

    2011


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    说明
    Last processed 6” wafer was Oct’21, currently the tool is not running with power-off condition.
    配置
    6" , can be upgraded to 8" 2 chambers SiO2 Clusterline machine that consist of 2x LL(LoadLock/Loading module) + TM(transfer module) + 1x Aligner(detect wafer flat) + 2x PM(process chamber) + 3x Degasser. The process chamber had run gases of O2, SF6, Ar, He, N2O, N2, NH3, SiH4, H2. Only process chamber was deposited with Silicon Nitride/Silicon Oxide
    OEM 型号描述
    未提供
    文件

    无文件