说明
Sputtering配置
无配置OEM 型号描述
The SIV inline system is a PVD tool that can deposit LCO, LPO and ITO onto panels with a substrate size of up to 1,000mm x 1,000mm. The maximum substrate size is 500mm. It has an RTA module integrated and a special designed chamber for LCO and LPO deposition. The tool is equipped with a special cathode for particle reduction and can deliver high quality/density LCO/LPO target. The system can perform pass-by or continuous deposition and can also deposit ITO.文件
无文件
ULVAC
SIV-200S
已验证
类别
PVD / Sputtering
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
73840
晶圆尺寸：
未知
年份：
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ULVAC
SIV-200S
类别
PVD / Sputtering
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
73840
晶圆尺寸：
未知
年份：
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Sputtering配置
无配置OEM 型号描述
The SIV inline system is a PVD tool that can deposit LCO, LPO and ITO onto panels with a substrate size of up to 1,000mm x 1,000mm. The maximum substrate size is 500mm. It has an RTA module integrated and a special designed chamber for LCO and LPO deposition. The tool is equipped with a special cathode for particle reduction and can deliver high quality/density LCO/LPO target. The system can perform pass-by or continuous deposition and can also deposit ITO.文件
无文件