说明
same as SIV-500 but used a carrier to process 3 each 6 inch wafers. • 3-station process module (P1. P2. P3) • 5 KW pulsed DC power supply • P3 dedicated to ITO or other Transparent Conductive Films <TCF) • P3 has 02 MFC & 13.56 MHz power supply/match to maintain ITO stoichiometry • L/L: has a roughing pump and water pump • Process chamber has a roughing pump. ·red to a turbo/water pump & a cryo pump SIV200 - Auto-Load (3) 6' wafers on 200mm x 200mm carrier - Front-end stocker holds (6) carriers - Uses Ulvac 10· cryo & 10· water pump/ turbo配置
无配置OEM 型号描述
未提供文件
无文件
ULVAC
SIV-200
类别
PVD / Sputtering
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
128840
晶圆尺寸：
6"/150mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
same as SIV-500 but used a carrier to process 3 each 6 inch wafers. • 3-station process module (P1. P2. P3) • 5 KW pulsed DC power supply • P3 dedicated to ITO or other Transparent Conductive Films <TCF) • P3 has 02 MFC & 13.56 MHz power supply/match to maintain ITO stoichiometry • L/L: has a roughing pump and water pump • Process chamber has a roughing pump. ·red to a turbo/water pump & a cryo pump SIV200 - Auto-Load (3) 6' wafers on 200mm x 200mm carrier - Front-end stocker holds (6) carriers - Uses Ulvac 10· cryo & 10· water pump/ turbo配置
无配置OEM 型号描述
未提供文件
无文件