说明
无说明配置
无配置OEM 型号描述
The RS-100 is a production-worthy resistivity measurement system used in nearly all fabs worldwide. It provides advanced automation and improved edge performance for 300mm wafers. It has accurate and repeatable resistivity measurements up to 1mm from the conductive film edge, patented temperature compensation, and easy-to-use software. It is used in metal deposition, CMP, ion implantation, and diffusion. Its enhanced edge performance provides greater insight into process control variance and lowers cost-of-ownership.文件
无文件
类别
Resistivity / Four Point Probe
上次验证： 60 多天前
物品主要详细信息
状况：
Parts Tool
运行状况:
未知
产品编号：
132013
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
OmniMap RS100
类别
Resistivity / Four Point Probe
上次验证： 60 多天前
物品主要详细信息
状况：
Parts Tool
运行状况:
未知
产品编号：
132013
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
无配置OEM 型号描述
The RS-100 is a production-worthy resistivity measurement system used in nearly all fabs worldwide. It provides advanced automation and improved edge performance for 300mm wafers. It has accurate and repeatable resistivity measurements up to 1mm from the conductive film edge, patented temperature compensation, and easy-to-use software. It is used in metal deposition, CMP, ion implantation, and diffusion. Its enhanced edge performance provides greater insight into process control variance and lowers cost-of-ownership.文件
无文件