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6" Fab For Sale from Moov - Click Here to Learn More

MATTSON / STEAG / AST 3000

说明

Single Chamber RTP with 3 Load/unloaders - Operational Condition

配置

RTP The software version of Mattson AST3000 (200mm) is MES 1.10.1. MFC-Typ Unit3000 / Unit 8160/ Unit 8100 MFC-Value MFC-Type 1. N2 / 100slm Unit3000 2. N2 / 30slm Unit8100 3. N2/ 20slm Unit8100 4. O2 / 50L STEC UNIT 1660 5. O2 / 10L UNIT 1660 6. Ar / 40L STEC 7. H2 / 40L UNIT 1660

OEM 型号描述

The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.

文件

文件图标

Mattson. AST3000,mov.mov

文件图标

MattsonAST3000.mov

文件图标

Mattson AST3000.mov

文件图标

Mattson. AST3000.mov

文件图标

Mattson AST3000 .mov

文件图标

MattsonAST3000 .mov

MATTSON / STEAG / AST

3000

verified-listing-icon

已验证

类别

RTP/RTA

上次验证： 60 多天前

物品主要详细信息

状况：

Used

运行状况:

未知

产品编号：

59225

晶圆尺寸：

8"/200mm

年份：

2000

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

类似上架物品

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

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上次验证60 多天前

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年份： 2002状况：二手

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MATTSON / STEAG / AST

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年份： 0状况：二手

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MATTSON / STEAG / AST

3000

年份： 0状况：二手

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MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

年份： 2007状况：二手

上次验证60 多天前

MATTSON / STEAG / AST

3000

verified-listing-icon

已验证

类别

RTP/RTA

上次验证： 60 多天前

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物品主要详细信息

状况：

Used

运行状况:

未知

产品编号：

59225

晶圆尺寸：

8"/200mm

年份：

2000

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

说明

Single Chamber RTP with 3 Load/unloaders - Operational Condition

配置

RTP The software version of Mattson AST3000 (200mm) is MES 1.10.1. MFC-Typ Unit3000 / Unit 8160/ Unit 8100 MFC-Value MFC-Type 1. N2 / 100slm Unit3000 2. N2 / 30slm Unit8100 3. N2/ 20slm Unit8100 4. O2 / 50L STEC UNIT 1660 5. O2 / 10L UNIT 1660 6. Ar / 40L STEC 7. H2 / 40L UNIT 1660

OEM 型号描述

The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.

文件

文件图标

Mattson. AST3000,mov.mov

文件图标

MattsonAST3000.mov

文件图标

Mattson AST3000.mov

文件图标

Mattson. AST3000.mov

文件图标

Mattson AST3000 .mov

文件图标

MattsonAST3000 .mov

类似上架物品

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTA年份： 2000状况：二手上次验证：60 多天前

MATTSON / STEAG / AST 3000

MATTSON / STEAG / AST

3000

RTP/RTA年份： 2002状况：二手上次验证：60 多天前

MATTSON / STEAG / AST 3000

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MATTSON / STEAG / AST 3000

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RTP/RTA年份： 0状况：二手上次验证：60 多天前

MATTSON / STEAG / AST 3000

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RTP/RTA年份： 2007状况：二手上次验证：60 多天前