
说明
RTP配置
无配置OEM 型号描述
The 2900 RTP system addresses 0.25-0.13 micron RTP applications at, what STEAG believes to be, the best cost of ownership in the industry. It incorporates the advanced capabilities of the 3000 RTP tool and the field proven capabilities of the 2800 and 8800 systems. Applications include silicide/barrier formation, BPSG reflow and densification, thin gate dielectrics, thermal donor annihilation and multilayer annealing.文件
无文件
类别
RTP/RTA
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
130858
晶圆尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
MATTSON / STEAG / AST
2900
类别
RTP/RTA
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
130858
晶圆尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
RTP配置
无配置OEM 型号描述
The 2900 RTP system addresses 0.25-0.13 micron RTP applications at, what STEAG believes to be, the best cost of ownership in the industry. It incorporates the advanced capabilities of the 3000 RTP tool and the field proven capabilities of the 2800 and 8800 systems. Applications include silicide/barrier formation, BPSG reflow and densification, thin gate dielectrics, thermal donor annihilation and multilayer annealing.文件
无文件