说明
Asset Description AST SUPER HEAT SYSTEM Software Version Window NT CIM GEM Process AST SUPER HEAT SYSTEM Asset Description AST SUPER HEAT SYSTEM Software Version Window NT CIM GEM Process AST SUPER HEAT SYSTEM System Type Description Quantity Handler System ROBOT 1 Factory Interface NONE Options System Handler System PREALIGNER 1 Main System MAIN TOOL 1 Handler System INDEXER 2200 2 Others Excluded Items List (Pumps, Chillers & Abatement are all excluded)配置
无配置OEM 型号描述
The 2800 RTP system is the STEAG Semiconductor Division's workhorse for mainstream applications. Over 500 have been installed worldwide. Applications include silicide/barrier formation, BPSG reflow and densification, shallow junction formation, thin gate dielectrics, thermal donor annihilation and multilayer annealing.文件
类别
RTP/RTA
上次验证： 今天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
138374
晶圆尺寸：
8"/200mm
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
类似上架物品
查看全部
MATTSON / STEAG / AST
2800
类别
RTP/RTA
上次验证： 今天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
138374
晶圆尺寸：
8"/200mm
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available