说明
RTP BPSG - AST SUPER HEAT SYSTEM配置
无配置OEM 型号描述
The 2800 RTP system is the STEAG Semiconductor Division's workhorse for mainstream applications. Over 500 have been installed worldwide. Applications include silicide/barrier formation, BPSG reflow and densification, shallow junction formation, thin gate dielectrics, thermal donor annihilation and multilayer annealing.文件
无文件
类别
RTP/RTA
上次验证： 16 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
143286
晶圆尺寸：
8"/200mm
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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MATTSON / STEAG / AST
2800
类别
RTP/RTA
上次验证： 16 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
143286
晶圆尺寸：
8"/200mm
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
RTP BPSG - AST SUPER HEAT SYSTEM配置
无配置OEM 型号描述
The 2800 RTP system is the STEAG Semiconductor Division's workhorse for mainstream applications. Over 500 have been installed worldwide. Applications include silicide/barrier formation, BPSG reflow and densification, shallow junction formation, thin gate dielectrics, thermal donor annihilation and multilayer annealing.文件
无文件