
说明
AG Associates Heatpulse rapid thermal processor配置
无配置OEM 型号描述
The Heatpulse 8800i and 8108i enable chipmakers to achieve significant savings in facility costs by combining the RTP system and Asyst's SMIF-Enclosure mini-environment into one integrated system, thereby reducing total system footprint, while increasing overall fab cleanliness. The Heatpulse 8800i and 8108i utilize the company's patented cross lamp oven and individual zone control to generate temperature uniformity. Both systems address the parameters for process repeatability, slip-free processing, and contamination control.文件
无文件
类别
RTP/RTA
上次验证: 30 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
126237
晶圆尺寸:
未知
年份:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
METRON / AG ASSOCIATES
HEATPULSE 8800i
类别
RTP/RTA
上次验证: 30 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
126237
晶圆尺寸:
未知
年份:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
AG Associates Heatpulse rapid thermal processor配置
无配置OEM 型号描述
The Heatpulse 8800i and 8108i enable chipmakers to achieve significant savings in facility costs by combining the RTP system and Asyst's SMIF-Enclosure mini-environment into one integrated system, thereby reducing total system footprint, while increasing overall fab cleanliness. The Heatpulse 8800i and 8108i utilize the company's patented cross lamp oven and individual zone control to generate temperature uniformity. Both systems address the parameters for process repeatability, slip-free processing, and contamination control.文件
无文件