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ANALYTICAL EQUIPMENT配置
-Type II stage with 5 axis motorization -Type I load lock, 4 inch (optional 6 inch) -Full control pad -CD Measurement -Turbo Pump -Upgrade to Windows XP ProOEM 型号描述
HITACHI S 4700 II is a SEM & TEM system. The S 4700 II has standard secondary electron detector (SE), a backscatter electron detector (BSD) and a Gatan MonoCL cathodoluminescence detector (CL). The BSD is sensitive to slight energy variations occurring when a high energy electron scatters off the nucleus of an atom. This sensitivity allows the BSD to map out variations in the densities of the sample. The CL measures photons released by the sample as it interacts with the electron beam and uses the information gathered from these photons to conduct elemental analysis.文件
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HITACHI
S-4700 II
类别
SEM / FIB
上次验证： 60 多天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
17698
晶圆尺寸：
未知
年份：
未知
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说明
ANALYTICAL EQUIPMENT配置
-Type II stage with 5 axis motorization -Type I load lock, 4 inch (optional 6 inch) -Full control pad -CD Measurement -Turbo Pump -Upgrade to Windows XP ProOEM 型号描述
HITACHI S 4700 II is a SEM & TEM system. The S 4700 II has standard secondary electron detector (SE), a backscatter electron detector (BSD) and a Gatan MonoCL cathodoluminescence detector (CL). The BSD is sensitive to slight energy variations occurring when a high energy electron scatters off the nucleus of an atom. This sensitivity allows the BSD to map out variations in the densities of the sample. The CL measures photons released by the sample as it interacts with the electron beam and uses the information gathered from these photons to conduct elemental analysis.文件
无文件