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SEMITOOL SST 642
    说明
    Batch Wafer Processing Etch/Clean - Wet Processing Currently Configured for: 200mm 6 tanks, 4 of them heated, 2 chambers.
    配置
    Warehoused Batch Wafer Processing Etch/Clean - Wet Processing Currently Configured for: 200mm 6 tanks, 4 of them heated, 2 chambers.
    OEM 型号描述
    The Spray Solvent Tool (SST) is a compact, efficient system that enhances chemical reactions on wafer surfaces. It employs mechanical and centrifugal forces to achieve uniform coverage on both sides of the wafer. The closed loop process control ensures consistent results, while continuous recycling and filtration of chemicals reduce waste. The SST offers precise temperature control and flexibility in chemical delivery methods. With its high throughput, small footprint, and operator safety features, it provides reliable and low-maintenance operation. The tool supports various processes, including GaAs clean, metal lift-off, photoresist removal, post-etch residue removal, and thin film heads. It utilizes technologies such as copper RDL and pillar structures. Flexibility - featuring two, four, or seven tank configuration in small footprint cabinet; process chambers, product carriers, and quick-disconnect rotors are available for wafers up to 200mm
    文件

    无文件

    类别
    Spray Solvent / Acid

    上次验证: 30 多天前

    物品主要详细信息

    状况:

    Used


    运行状况:

    Deinstalled


    产品编号:

    128820


    晶圆尺寸:

    8"/200mm


    年份:

    未知


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available

    SEMITOOL

    SST 642

    verified-listing-icon
    已验证
    类别
    Spray Solvent / Acid
    上次验证: 30 多天前
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    物品主要详细信息

    状况:

    Used


    运行状况:

    Deinstalled


    产品编号:

    128820


    晶圆尺寸:

    8"/200mm


    年份:

    未知


    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    说明
    Batch Wafer Processing Etch/Clean - Wet Processing Currently Configured for: 200mm 6 tanks, 4 of them heated, 2 chambers.
    配置
    Warehoused Batch Wafer Processing Etch/Clean - Wet Processing Currently Configured for: 200mm 6 tanks, 4 of them heated, 2 chambers.
    OEM 型号描述
    The Spray Solvent Tool (SST) is a compact, efficient system that enhances chemical reactions on wafer surfaces. It employs mechanical and centrifugal forces to achieve uniform coverage on both sides of the wafer. The closed loop process control ensures consistent results, while continuous recycling and filtration of chemicals reduce waste. The SST offers precise temperature control and flexibility in chemical delivery methods. With its high throughput, small footprint, and operator safety features, it provides reliable and low-maintenance operation. The tool supports various processes, including GaAs clean, metal lift-off, photoresist removal, post-etch residue removal, and thin film heads. It utilizes technologies such as copper RDL and pillar structures. Flexibility - featuring two, four, or seven tank configuration in small footprint cabinet; process chambers, product carriers, and quick-disconnect rotors are available for wafers up to 200mm
    文件

    无文件